Growth temperature dependence of the LaAlO3/SrTiO3 interfacial structure

Abstract

The growth temperature dependence of the interfacial structure of LaAlO3 thin films on SrTiO3 substrates is clearly observed by means of surface x-ray diffraction, combined with a holographic analysis. Although the interfacial structure that is tuned by the fabrication condition is known as a key to the control of various film properties, such a minute change in structure has not been studied in detail. Our observations show that a microscopic evaluation of the interfacial structure, as a function of the growth conditions, is achievable. © 2011 Published under licence by IOP Publishing Ltd.