Electric equivalent circuit for the thickened edge load solution in a Bulk Acoustic Wave resonator

Abstract

With the aim to improve the performance of Bulk Acoustic Wave resonators, the thickened edge load can be included on the top electrode. Using this solution, the energy trapping concept is forced, and lateral unwanted resonances are not present in the electrical behavior of the resonator. The way to design such a thickened edge load entails, on one hand, the presence of a resonant mode given by the thickened edge load; on the other hand, the degradation of the electromechanical coupling coefficient of the main thickness mode. In order to study the previous phenomena, the electric equivalent circuit has been developed. The obtained results have been validated with the three-dimensional simulations and compared with manufactured resonators.