Microcantilever array sensors using nanoporous metal-organic frameworks (MOFs) for gas detection

Abstract

This paper describes stress induced sensing mechanism with two different MOFs, specifically HKUST-1 and Cu(NDC)DABCO, on n-type piezoresistive microcantilever array. Thermomechanical responses of microcantilever sensors were characterized using water and methanol vapor in a designed gas test cell. The sensors exhibited substantially high sensitivity, 25.1 ohms/Mole % for H2O with HKUST-1, at room temperature and 5 times faster response time with Cu(NDC)DABCO at elevated temperature. The key advantages of this new sensor are: 1) higher strain sensitivity due to n-type piezoresistors; 2) high selectivity with a nanoporous MOFs; 3) reversible response; and 4) possibility of multi-analyte detection due to array structure.