Atmospheric pressure plasma generation using dielectric barrier discharge stacked by insulator coated comb-electrodes

Abstract

To generate volumetric atmospheric-pressure plasma, we proposed a dielectric barrier discharge system with stacked insulator-coated comb-electrodes. The large volumetric plasma was generated in each gap and surface of insulators by stacking electrodes. From the spectroscopic measurement of plasma, almost same shaped spectra were measured from 2 to 10 electrodes. In addition, the ozone concentration in plasma was estimated by the absorption spectroscopy. In this result, the constant ozone concentration was measured from 2 to 10 electrodes.