Micrometer scale resolution limit of a fiber-coupled electro-optic probe

Abstract

We present the practical resolution limit of a fine electrical structure based on a fiber-coupled electro-optic probing system. The spatial resolution limit was experimentally evaluated on the sub-millimeter to micrometer scale of planar electrical transmission lines. The electrical lines were fabricated to have various potential differences depending on the dimensions and geometry. The electric field between the lines was measured through an electro-optic probe, which was miniaturized up to the optical bare fiber scale so as to investigate the spatial limit of electrical signals with minimal invasiveness. The experimental results show that the technical resolution limitation of a fiber-coupled probe can reasonably approach a fraction of the mode field diameter (~10 μm) of the fiber in use.