The Etching of ZnO/Glass by Hydrogen Peroxide Solution: Surface Morphological, Structural, and Optical Properties

Abstract

This research was conducted to study the surface morphological, structural and optical properties of the samples after applying hydrogen peroxide (H2O2) etching on Zinc Oxide ZnO/glass substrates. In order to fabricate ZnO thin film on the soda lime glass substrate, RF sputtering machine was used. The deposited layer of the ZnO thin film thickness was measured to be 1.218µm. The ZnO/glass samples were then immersed by the percentage of the hydrogen peroxide (H2O2) concentrations which were 5% and 30% at the different time treatments. After immersing the samples into 30% concentration of H2O2 for 50 seconds, the result in SEM images showed the formation circles that resemble ZnO islands. The thickness of ZnO layer is reduced when the immersion time increases.