Optimization of Plasma Production with Impedance Analysis for a Micro RF Ion Thruster

Abstract

We investigate the conditions optimized generating plasma for micro RF ion thruster (mRIT) which has the discharge chamber that is one of the smallest size in the world. To search the optical conditions in priority to the speed, we calculate the simulation model that is composed of the equivalency circuit model and the global model. Since the global model has not been taken account into the calculate model for mRIT yet, so we first confirm the influences of this model. Then, we find that the electron density and temperature are varied, but the efficiency is almost not affected by the global model. From that point of the sheath thickness, we find that we cannot always ignore the sheath resistance on the chamber sidewall. Next we investigate the influence whether including this sheath resistance or not. If taken account of this sheath resistance, the efficiency is improved greatly in the lower RF frequency that is RF frequency is less than 100 MHz.