Miniaturized capillary electrophoresis fabricated on Pyrex glass chips using deep dry etching and anodic bonding

Abstract

Transparent glass and plastics are commonly used as substrate materials of biochemical analysis chips since light is often used for detection and observation of samples. Especially Pyrex® glass is a material promising for chemical/biochemical analysis chips as well as for conventional lab wares since it is excellent in chemical and thermal stability, and thermal conductivity. In this paper, in order to establish the fabrication process of highly functional bio analysis systems on Pyrex substrates, high precision microfabrication technology of microfluidics using deep dry etching and the fast microchannel sealing method using anodic bonding have been studied. By adopting these technologies, a prototype microcapillary electrophoretic separator has been fabricated on a Pyrex® chip and its performance has been examined.