Functionalization of Thermally Carbonized Porous Silicon Optical Multilayer Structures for Sensing Applications

  • Salonen J
  • Mäkilä E
  • Urata T
  • et al.
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Abstract

Some general points regarding the fabrication of thermally carbonized and hydrocarbonized porous silicon-based optical filters are discussed. The differences between the two carbonization treatments are pointed out, and methods for further functionalization are presented. Finally, the effects of the aforementioned surface functionalization methods are evaluated, and usefulness of the resulting chemically modified optical structures in biosensing applications is demonstrated.

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Salonen, J., Mäkilä, E., Urata, T., Torres-Costa, V., & Jalkanen, T. (2013). Functionalization of Thermally Carbonized Porous Silicon Optical Multilayer Structures for Sensing Applications. ECS Transactions, 58(8), 63–70. https://doi.org/10.1149/05808.0063ecst

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