Comparison on properties of LaF3 films by Mo boat evaporation on stationary and planetary rotating substrates

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Abstract

Investigation and comparison are made for LaF3 films deposited on stationary and planetary rotating fused-silica substrates by Mo boat evaporation. Influences of substrate movement manners on the film structures and optical properties are discussed. © OSA 2013.

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Kong, M., Liu, C., & Li, B. (2013). Comparison on properties of LaF3 films by Mo boat evaporation on stationary and planetary rotating substrates. In Optics InfoBase Conference Papers. Optical Society of America (OSA). https://doi.org/10.1364/oic.2013.wb.9

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