Modelling and FEM Simulation of Love Wave SAW-Based Dichloromethane Gas Sensor †

Abstract

In this paper, surface acoustic wave (SAW) technology based on love waves was designed in three dimensions for finite element modelling (FEM) and analysis in order to detect volatile organic compounds (VOC). A thin layer of polyisobutylene (PIB), which acted as the sensing layer, was placed on top of the guiding layer of SiO2 and interdigitated electrodes (IDE), which were modelled on a piezoelectric substrate. The substrate selected was 64° YZ-cut Lithium niobate (LiNbO3) for love wave generation, and the lightweight electrodes were made of Aluminium (Al). Analytical simulations were conducted using COMSOL Multiphysics 6.0 software.