Design and fabrication of large-area tunable MOEMS-based shortwave infrared Fabry-Pérot filters

Abstract

In this letter, the authors report the micro-opto-electro-mechanical system-based large-area tunable Fabry-Pérot filters (FPF) with an aperture size of up to 300 μm. The sputtered zinc oxide layer is used as the sacrificial layer during the releasing process. The fabricated FPFs exhibit a tuning range of 188 nm in the near-infrared wavelength range when the voltage is biased from 0 to 7.5 V. The stiffness of supporting arms of the electrostatic actuator is calculated to be 2799 N/m from the analyses of capacitance-voltage measurements. The designed FPFs can be used in shortwave infrared (SWIR) spectral analyses with suitable SWIR sensors.