Development of a focused-beam ellipsometer based on a new principle

Abstract

Ellipsometers, in which an objective lens is placed in the normal direction to a sample surface, have been developed to obtain the ellipsometric data at a focusing point within a highly narrow region. In this paper, we will introduce a focused-beam ellipsometer established with a new method for data acquisitions. By using a novel technique, we can measure the optical properties of thin films at the various angles of incidence. © 2007 American Institute of Physics.