Micromachined accelerometers with sub-µg/ Hz noise floor: A review

Abstract

This paper reviews√ the research and development of micromachined accelerometers with a noise floor lower than 1 µg/ Hz. Firstly, the basic working principle of micromachined accelerometers is introduced. Then, different methods of reducing the noise floor of micromachined accelerometers√ are analyzed. Different types of micromachined accelerometers with a noise floor below 1 µg/ Hz are discussed. Such sensors can mainly be categorized into: (i) micromachined accelerometers with a low spring constant; (ii) with a large proof mass; (iii) with a high quality factor; (iv) with a low noise interface circuit; (v) with sensing schemes leading to a high scale factor. Finally, the characteristics of various micromachined accelerometers and their trends are discussed and investigated.