Abstract
We have observed Ru hyperoxides (RuO 3 and RuO 4) in Ru-O 2-Ar plasmas using mass-energy analysis. Based on ab initio adsorption data, a nanorod formation model is presented. RuO 3 exhibits the strongest adsorption on RuO 2(001). Adatoms impinging on these RuO 3 islands are likely to contribute towards three-dimensional growth due to Ehrlich-Schwoebel barriers. We propose that RuO 3 islands act as nucleation sites for the nanorod formation. Our model is consistent with available experimental data. © 2012 American Institute of Physics.
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CITATION STYLE
Music, D., Breunung, J., Mrz, S., & Schneider, J. M. (2012). Role of RuO 3 for the formation of RuO 2 nanorods. Applied Physics Letters, 100(3). https://doi.org/10.1063/1.3677665
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