Nanoscale servo control for galvano scanner using final-state control

Abstract

This Paper Proposes A New Des. Method of Nanoscale Servo Contr. for A Galvano Scanner by Using FFSC Method. in the Galvano Scanner, It Is Important to Reduce the Residual Vibr. after Positioning; Further, This Scanner Must Be Robust to the Variation of the Reson. Modes of the Plant. in This Paper A Feedforward Input Is Designed by Using FFSC by Considering Not only Nominal Perf. but Also Robust Perf.. Simulations and Exp. Results Are Shown to Evaluate the Effectiveness of the Proposed Method. 2009 the Inst. of Elec. Engineers of Japan.