Design, simulation and performance analysis of novel cantilever Rf-mems switch using serpentine meanders

Abstract

In this paper, we have designed a novel RF MEMS cantilever structure and optimised its dimensions through parametric analysis to minimize the actuation voltage and to enhance the performance of the RF MEMS series switch at Ka-Band frequency. The selection of appropriate materials for the device is also done through the electromechanical parametric analysis. We minimised the dimensions of the switch and increased the performance. To enhance the performance and characteristics of the proposed device electromechanical and solid mechanical analysis such as pull in voltage, capacitance, switching time, stress analysis, RF performance analysis have been done. The pull in voltage is reduced to 5.5V and the switching time taken by the switch is 0.10msec, Up capacitance formed between the electrodes in ON state is 29.3Ff and Down capacitance is 3.05Pf which are obtained through the Finite element model tools i.e., Comsole 5.0.The RF performance of the switch is done by using the Ansys HFSS simulator,the switching is having less than 1dB insertion loss and isolation of-28.0dB at 30GHz. the proposed device structure can be used at high frequencies in wireless applications and satellite applications.