MEMS piezoresitive cantilever mass sensor response for detection of volatile organic compounds using omnicant experimental platform

Abstract

MEMS piezoresitive cantilever is a system that is utilized to identify VOC molecules like acetone, ethanol, isopropyl and ethyl acetate. These molecules have molecular weights ranging from 46.07gms/mole to 88.1gms/mole. These molecules can be identified due to the deflection changes of the cantilever when the change in the mass occurs due to the deposition of molecules on the cantilever. Thus in this paper the responses from the piezoresistive micro cantilever with different analytes using OMNICANT were obtained.