Development of MEMS liquid cell to visualize the dynamics of bubbles and droplets at the microscale

Abstract

I developed a microelectromechanical system (MEMS) liquid cell for the visualization of bubbles and droplets at the microscale using a scanning electron microscope (SEM). The MEMS liquid cell has an electron transparent membrane and a microchannel. The electron transparent membrane was 80-nm-thick Si3N4. I tested the wettability of the electron transparent membrane and liquid leakage, and simulated the scattering of an electron beam. The MEMS liquid cell was equipped on the SEM custom-made holder for in-liquid specimens. I observed the floating of bubbles in the microchannel and the formation and growth of droplets on the electron transparent membrane at the microscale using an SEM.