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Towards large-scale silicon photonics integration

Optics InfoBase Conference Papers (2013)
DOI: 10.1364/iprsn.2013.im3a.2
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Abstract

We present on the development of a 300mm silicon photonics platform incorporating multilevel copper interconnects, vertical junction modulators, germanium detectors, and silicon nitride layers. Within this platform, we demonstrate large-scale silicon photonic circuits. © OSA 2013.

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APA

Watts, M. R. (2013). Towards large-scale silicon photonics integration. In Optics InfoBase Conference Papers. Optical Society of America (OSA). https://doi.org/10.1364/iprsn.2013.im3a.2

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