Micro-Electro-Discharge Machining Technologies for MEMS

  • Takahata K
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Abstract

… to the manufacturing of such systems is the need for assembly of the machined components … planar design of the stent also permits the use of the batch machining method discussed … ie, perpendicular to the original plane of the pre-expansion planar microstructure and parallel …

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APA

Takahata, K. (2009). Micro-Electro-Discharge Machining Technologies for MEMS. In Micro Electronic and Mechanical Systems. InTech. https://doi.org/10.5772/7009

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