Flexible Microstructured Capacitive Pressure Sensors Using Laser Engraving and Graphitization from Natural Wood

Abstract

In recent years, laser engraving has received widespread attention as a convenient, efficient, and programmable method which has enabled high-quality porous graphene to be obtained from various precursors. Laser engraving is often used to fabricate the dielectric layer with a microstructure for capacitive pressure sensors; however, the usual choice of electrodes remains poorly flexible metal electrodes, which greatly limit the overall flexibility of the sensors. In this work, we propose a flexible capacitive pressure sensor made entirely of thermoplastic polyurethane (TPU) and laser-induced graphene (LIG) derived from wood. The capacitive pressure sensor consisted of a flexible LIG/TPU electrode (LTE), an LIG/TPU electrode with a microhole array, and a dielectric layer of TPU with microcone array molded from a laser-engraved hole array on wood, which provided high sensitivity (0.11 kPa−1), an ultrawide pressure detection range (20 Pa to 1.4 MPa), a fast response (~300 ms), and good stability (>4000 cycles, at 0–35 kPa). We believe that our research makes a significant contribution to the literature, because the easy availability of the materials derived from wood and the overall consistent flexibility meet the requirements of flexible electronic devices.