A U-shaped microwave resonator for flexible mechanical sensors application

Abstract

A flexible mechanical deformation test system, which is a combination of the microwave and the flexible film, is proposed. The system consists of a U-shaped microwave resonator, coaxial transmission line, and PDMS flexible substrate. Microwave signals are generated from the vector network analyzer and loaded to the coaxial transmission line and then coupled to the U-shaped resonator through the coupling loop. The resonator works at the gigahertz band with the test range from 3 GHz to 40 GHz. The resonant frequency of the resonator can be adjusted by changing the shape of PDMS, and the related signals can be detected by using the S11 parameter of the microwave. The response time of the U-shaped resonator is less than 20 ms, and the sensitivity on the curved surface is 12.5 Hz/nm.