The effect of deposition rate on morphology and structural properties of carbon-nickel composite films

Abstract

Carbon-nickel films were grown by radio frequency magnetron cosputtering on glass substrates. The films were deposited under different deposition times, from 50 to 600 sec, at room temperature. We noticed that up to 180 sec the sputtering occurs in more metal content mode and in greater than 180 sec it occurs in more nonmetal content mode. It is shown that the structural and morphological properties of carbon-nickel films were strongly influenced by this behavior. © 2013 Smohammad Elahi et al.