Apatite formation on Rutile TiO 2 film deposited using dual cathode DC unbalanced Magnetron sputtering

Abstract

Rutile TiO 2 films were deposited on unheated stainless steel type 316L using dual cathode DC unbalanced magnetron sputtering. The effects of deposition time ranging 30, 60, 90, and 120 min on the films structure were investigated. Moreover, all the samples were immersed in SBF for period times of 3 and 5 days also considered. The crystal structures were characterized by thin film X-ray diffraction (TF-XRD). The film's thickness and surface morphology were evaluated using atomic force microscopy (AFM). The crystallinity, roughness, thickness, and grain size of rutile with only (110) plane increased with increased deposition time. After immersed samples in SBF for 3 day the highest and moderate crystallinity of apatite was observed on the 30 min and 90 min, respectively. However, the films deposited with 60 and 120 min cannot be observed the peak of apatite. An increase crystallinity of apatite clearly observed when after immersed in SBF for 5 day.