A versatile technology platform for microfluidic handling systems, part II: channel design and technology

Abstract

Microfluidic devices often require channels of a specific size and shape. These devices are then made in a fabrication process that is often specialized to produce only those (and very similar) channels. As a result, devices requiring channels of different size and shape cannot easily be integrated on the same chip. This paper presents a method to fabricate microfluidic channels in a wide range of shape and size on the same chip by using a slit pattern through which the channels are etched. The fabrication process to fabricate these channels is discussed in detail, and an empirical model is presented to find the optimal slit pattern for a required size and shape. This part of the paper focusses on the channel design and fabrication. Details on the whole fabrication process and optional functionalization of the channels are presented in part I of this paper.