Fabrication and characterization of flexible electrowetting on dielectrics (EWOD) microlens

42Citations
Citations of this article
52Readers
Mendeley users who have this article in their library.

Abstract

We present a flexible variable-focus converging microlens actuated by electrowetting on dielectric (EWOD). The microlens is made of two immiscible liquids and a soft polymer, polydimethylsiloxane (PDMS). Parylene intermediate layer is used to produce robust flexible electrode on PDMS. A low-temperature PDMS-compatible fabrication process has been developed to reduce the stress on the lens structure. The lens has been demonstrated to be able to conform to curved surfaces smoothly. The focal length of the microlens is 29-38 mm on a flat surface, and 31-41 mm on a curved surface, varying with the voltage applied. The resolving power of the microlens is 25.39 line pairs per mm by a 1951 United States Air Force (USAF) resolution chart and the lens aberrations are measured by a Shack-Hartmann wavefront sensor. The focal length behavior on a curved surface is discussed and for the current lens demonstrated the focal length is slightly longer on the curved surface as a result of the effect of the curved PDMS substrate.

References Powered by Scopus

Spontaneous formation of ordered structures in thin films of metals supported on an elastomeric polymer

2143Citations
N/AReaders
Get full text

Variable-focus liquid lens for miniature cameras

1032Citations
N/AReaders
Get full text

Digital cameras with designs inspired by the arthropod eye

996Citations
N/AReaders
Get full text

Cited by Powered by Scopus

Self-cleaning: From bio-inspired surface modification to MEMS/microfluidics system integration

51Citations
N/AReaders
Get full text

Multifunctional liquid lens for variable focus and zoom

48Citations
N/AReaders
Get full text

Design and fabrication of an electrohydrodynamically actuated microlens with areal density modulated electrodes

21Citations
N/AReaders
Get full text

Register to see more suggestions

Mendeley helps you to discover research relevant for your work.

Already have an account?

Cite

CITATION STYLE

APA

Li, C., & Jiang, H. (2014). Fabrication and characterization of flexible electrowetting on dielectrics (EWOD) microlens. Micromachines, 5(3), 432–441. https://doi.org/10.3390/mi5030432

Readers' Seniority

Tooltip

PhD / Post grad / Masters / Doc 29

78%

Researcher 6

16%

Professor / Associate Prof. 2

5%

Readers' Discipline

Tooltip

Engineering 27

77%

Materials Science 3

9%

Physics and Astronomy 3

9%

Computer Science 2

6%

Save time finding and organizing research with Mendeley

Sign up for free