Angular and energy dependences of reflection electron energy loss spectra of Si

Abstract

Reflection electron energy loss spectroscopy (REELS) experiments at various emission angles were carried out using an inclined sample holder. The inclined sample holder can provide a wide range of emission angles to the surface normal (15°-75°) by rotating the sample holder. The REELS spectra for Si were measured for electron beam energies from 500 to 4500 eV. The experimental λK(△Σ) spectra of Si, which are the product of the inelastic mean free path and the differential inverse inelastic mean free path, were obtained from the REELS spectra. It clearly showed the variation of relative contribution of bulk and surface loss in these series of the λK(△Σ) spectra. We found that the bulk plasmon and surface plasmon contribution varied with the incident beam energies and emission angles. © 2009 The Surface Science Society of Japan.