Full-field phase measurement by wavelength-tuning interferometry in the C-band

Abstract

Fluctuations in the output intensity and wavelength of an external cavity diode laser can introduce significant error to wavelength-tuned interferometric measurement. However, a robust phase-retrieval algorithm can compensate for these nonlinearities. Employing an inexpensive phosphor-coated charge-coupled device camera sensitive to C-band infrared, full-field interferometric phase retrieval utilizing wavelength tuning of a 1555 nm external cavity diode laser is reported. Phase measurement of a tilted mirror is presented with an estimated accuracy within 7 nm. © 2006 Society of Photo-Optical Instrumentation Engineers.