Low-divergence high-power VCSEL arrays for lidar application

Abstract

Development of multi-mode, high-power, large-aperture two-dimensional VCSEL arrays, operating at a nominal wavelength of 940nm, with highly stable beam profile will be presented. They are designed and fabricated using Trilumina’s proprietary flip-chip-bondable back-side-emitting VCSEL array chip technology. We have demonstrated that a 150-element VCSEL chip array with the improved design shows divergence angle (FWHM) of less than 15°. Additionally, we have integrated this design into drive circuitry that allows us to achieve peak optical powers in excess of 400W.