3D Mesostructures: Fabrication and Deformation of 3D Multilayered Kirigami Microstructures (Small 11/2018)

Abstract

In article number 1703852, Andreas A. Polycarpou and co-workers fabricate and study the deformation of three-dimensional (3D) multilayered Kirigami microstructures with potential applications in 3D microelectromechanical systems (MEMS) devices. The mechanical response under flat-punch compression is studied using combined experiments and finite element analyses. The findings reveal different geometry-dependent deformation for the structures.