Abstract
Electrostatic probes were utilized as tools to measure the space-charge-neutralization by a plasma flood gun (PFG). Thought the probes did not show ordinary current voltage characteristics in a dilute plasma in the ion beam propagation region, a clear shift of the local potential was identified with the method. The effectiveness of the PFG for the space-charge-neutralization was found dependent upon the distance from the PFG.
Author supplied keywords
Cite
CITATION STYLE
Arai, T., Kuwata, Y., Miyamoto, N., Kasuya, T., & Wada, M. (2018). Space Charge Neutralization by a Microwave Linear Antenna Plasma Flood Gun. In Proceedings of the International Conference on Ion Implantation Technology (Vol. 2018-September, pp. 196–199). Institute of Electrical and Electronics Engineers Inc. https://doi.org/10.1109/IIT.2018.8807984
Register to see more suggestions
Mendeley helps you to discover research relevant for your work.
