An Introduction to Lithography Machine

Abstract

With the rapid advance of industrial intelligent manufacturing and electronic information technology, the importance of integrated circuits keeps increasing. As a fundamental equipment of integrated circuits manufacturing, the lithography machine has become a key research target for researchers around the world. This paper provides a short overview of the lithography technology and lithography machines. Key elements of lithography machines, such as the operation mode, the light source and photoresist, have been focused in this paper. The future development prospect of lithography technology is also summarized.