Improved micronanogenerators based on silicon compatible materials and processing

Abstract

Our work on all-silicon thermoelectric micro power generation is reviewed including the latest improvements. Our devices use low-dimensional silicon-based thermoelectric material, namely Si and (for the first time) SiGe nanowires. A new redesign leading to a significant reduction in parasitic device thermal conductance and lower electrical resistance has been tested and a route for the integration of a heat exchanger onto it has been recently attempted. Power densities of a few tens of μW/cm2 have been achieved.