Highly sensitive reflective-mode defect detectors and dielectric constant sensors based on open-ended stepped-impedance transmission lines

Abstract

In this paper, reflective-mode phase-variation sensors based on open-ended stepped-impedance transmission lines with optimized sensitivity for their use as defect detectors and dielectric constant sensors are reported. The sensitive part of the sensors consists of either a 90° high-impedance or a 180° low-impedance open-ended sensing line. To optimize the sensitivity, such a sensing line is cascaded to a 90° transmission line section with either low or high characteristic impedance, resulting in a stepped-impedance transmission line configuration. For validation purposes, two different sensors are designed and fabricated. One of the sensors is implemented by means of a 90° high impedance (85 Ω) open-ended sensing line cascaded to a 90° low impedance (15 Ω) transmission line section. The other sensor consists of a 180° 15-Ω open-ended sensing line cascaded to a 90° 85-Ω line. Sensitivity optimization for the measurement of dielectric constants in the vicinity of that corresponding to the Rogers RO4003C substrate (i.e., with dielectric constant 3.55) is carried out. The functionality as a defect detector is demonstrated by measuring the phase-variation in samples consisting of the uncoated Rogers RO4003C substrate (the reference sample) with arrays of holes of different densities.