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The Kinetics of Silicon Deposition on Silicon by Pyrolysis of Silane

  • Farrow R
Journal of The Electrochemical Society (1974) 121(7) 899
DOI: 10.1149/1.2401950
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Abstract

The of on by Pyrolysis of Silane. Journal of The Electrochemical Society 121, 899 (1974). RFC . Abstract. The of silane pyrolysis on a (111) surface has been investigated

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Farrow, R. F. C. (1974). The Kinetics of Silicon Deposition on Silicon by Pyrolysis of Silane. Journal of The Electrochemical Society, 121(7), 899. https://doi.org/10.1149/1.2401950

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