First step towards the growth of single-crystal oxides on Si: Formation of a two-dimensional crystalline silicate on Si(001)

Abstract

We have investigated the structural and chemical properties of reconstructed Sr/Si(001) surfaces at different Sr coverages using low energy electron diffraction, x-ray photoelectron spectroscopy, and scanning tunneling microscopy. The results show that upon low temperature oxidation and subsequent UHV annealing of the Sr/Si(001)-(2 × 1) surface, a crystalline Sr2SiO4 silicate-like layer formed. Using this layer as a template, single-crystal SrO thin films were grown on Si(001) substrates. Our results provide microscopic and spectroscopic evidence of the formation of a uniform, stable, two-dimensional crystalline silicate that can be used for growth of single-crystal oxides on Si(001) substrates.