Patterson-like analysis of diffuse x-ray scattering from epitaxial mosaic PbTe layers on Si(111)

Abstract

A simple approach for the analysis of mosaic epitaxial layers is proposed, based on a Patterson-like analysis of the reciprocal-space distribution of the scattered intensity. Within this approach, the mosaic-block-shape function P and the deformation correlation function are determined. The method is used for the analysis of relaxed PbTe epitaxial layers on Si(111). The sizes of the mosaic blocks determined by this method are compared with the results of conventional Williamson-Hall-type analyses of the width of the diffraction maxima. The block sizes compare well with the mean distances of threading dislocations penetrating the PbTe layers. © 2005 American Institute of Physics.