Abstract
Exposing active Spindt-type molybdenum field emission microcathode arrays to CH4 resulted in increased electron emission. Exposures of 250 and 2500 L result in electron emission enhancement of 106.2±41.0% and 200.1±20.7% and a decrease in tip work function by 10.2±5.6% and 17.6±1.7%, respectively. The measured work function changes indicate the formation of molybdenum carbides on the field emitter tips.
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CITATION STYLE
Chalamala, B. R., Wallace, R. M., & Gnade, B. E. (1998). Effect of CH4 on the electron emission characteristics of active molybdenum field emitter arrays. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, 16(6), 3073–3076. https://doi.org/10.1116/1.590444
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