Diamond-like carbon coating applications in MEMS

Abstract

Diamond-like carbon (DLC) coatings possess excellent mechanical properties, exceptional tribological performance, biocompatibility, better surface properties, chemical inertness, and structural and thermal stability. Therefore, these are widely employed in micro-electromechanical systems (MEMS). This chapter highlights the DLC applications in MEMS for different purposes, e.g. sensors, actuators, industrial processing, structural stability, and tribology.