Optimization is an important area of research. As many optimization problems are NP-Hard it is important to have a wide selection of heuristic approaches to choose from when solving problems. Prioritized planning is a technique traditionally used to solve the multi-robot path planning problem. In this paper we investigate how incremental scheduling, a technique based upon prioritized planning can be applied to scheduling wafer processing in a cluster tool. For our test case our approach is shown to be capable of finding a plan of equal quality to other scheduling approaches and thus suggests our method could be of potential use in other manufacturing/material handling applications.
CITATION STYLE
Ware, F. S., & Su, S. R. (2017). An Application of Incremental Scheduling to a Cluster Photolithography Tool. In IFAC-PapersOnLine (Vol. 50, pp. 1114–1120). Elsevier B.V. https://doi.org/10.1016/j.ifacol.2017.08.393
Mendeley helps you to discover research relevant for your work.