Ion beam induced charge imaging of epitaxial GaN detectors

Abstract

We report the use of ion beam induced charge imaging to characterise the charge signal uniformity of epitaxial gallium nitride radiation detectors. The detectors were fabricated from 2μm thick semi-insulating gallium nitride, grown by MOCVD on a sapphire substrate. A carrier concentration of 1.4×1015cm-3 was measured using capacitance-voltage measurements. Ion beam induced charge imaging was carried out with a 2MeV alpha particle beam focussed to a 3μm diameter and raster scanned across the device. The resulting ion beam images show excellent charge signal uniformity in this material with no evidence of material defects or polycrystalline structure on the micrometer length scale. No evidence of charge signal trapping was observed in these devices. © 2004 Elsevier B.V. All rights reserved.